IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

IEEE RAS TC on Semiconductor Manufacturing Automation

The technical committee will promote exchanges among researchers from academia, industry, and government in the field of semiconductor manufacturing automation. Its purpose is to identify and advance key technologies and technical approaches that enable intelligent, automated, and resilient semiconductor manufacturing systems. These exchanges include conferences, workshops, special sessions, and publications that foster discussion on both technical challenges and industrial applications. 

Topics of Interest

AI-driven planning, scheduling, and optimization for semiconductor manufacturing; intelligent equipment and fab-level automation; digital twins and data-centric decision intelligence for fabs; autonomous material handling and logistics systems; and resilient manufacturing systems under uncertainty. 

Chairs

• Mengchu Zhou, New Jersey Institute of Technology, zhou@njit.edu 

• Chen-Fu Chien, National Tsing Hua University, cfchien@mx.nthu 

• Adar Kalir, Intel Corporation, adar.kalir@intel.com

• Hyun-Jung Kim, KAIST, hyunjungkim@kaist.ac.kr

Associate Chair

• Ram Chandra Palsaniya, Applied Materials Inc. palsaniya2019@gmail.com

News

Recent Workshops

• Embodied AI for Robot-Powered Manufacturing Systems, IEEE CASE 2025

• IEEE International Workshop on Intelligent Manufacturing, Robotics and Data Engineering, Newark, NJ, USA, 2025

• Symposium on Integration of AI and Third-Generation Semiconductors, Hong Kong, 2025

• Vehicle Formations in Industry and Intelligent Transportation Systems: From Model-Based to Data-Driven Solutions, IEEE CASE 2024

• IEEE International Workshop on Semiconductor Manufacturing Automation and Robotics, Newark, NJ, USA, 2024

Contact

IEEE RAS TC Website: https://www.ieee-ras.org/semiconductor-manufacturing-automation/

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